TSMC and ASML partner on 12-inch EUV photomasks

Sep 08, 2026

TSMC and ASML are teaming up to move chipmaking to bigger photomasks, a long-term positive for chip costs and for AI hardware makers.

  • TSMC will work with ASML to shift from 6-inch to 12-inch EUV photomasks, the templates used to print circuits onto silicon.
  • A pilot line is planned for 2031, with full production around 2033.
  • Bigger masks should make chip factories more productive and cut the cost of each chip.
  • They also remove the need to stitch two smaller masks together on the newest High NA machines.
  • TSMC plans to start mass production using ASML's High NA tools in 2030, as AI chips demand ever more complex designs.

Outlook: Chipmakers will keep using 6-inch masks for years, so the real payoff lands early next decade.

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