ASML High NA EUV moves toward high-volume production with 10 machines in use

Sep 01, 2026

ASML's next-generation chipmaking machines are moving from testing into real factory production, good news for chipmakers pushing to smaller, cheaper advanced chips.

  • Four customers now run ten High NA EUV machines, with three more being shipped and installed.
  • The systems have printed more than 1.35 million wafers, and one certified model hit production-grade speed in acceptance testing.
  • The technology has been used for the first time on a high-volume logic chip product, a key milestone.
  • Sharper printing lets chipmakers replace complicated multi-step patterning with a single exposure, cutting cost and complexity.
  • Machine uptime across the fleet has climbed to 84%, with a target of 93%.

Outlook: ASML aims to lift output speed by roughly a third before the decade ends, and expects the platform to support advanced logic and memory shrinks for over ten years.

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